- Country: Finland
- Summary: Lbl System
- FIT Ref No: 117436139
- Deadline: 12 May 2025
- Financier: Self Financed
- Purchaser Ownership: Government
- Tender Value: Refer Document
- Notice Type: Tender
- Document Ref. No.: 230844-2025
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- Description:
- A laser beam lithography system (LBL) for advanced microfabrication of semiconductor and biomedical devices. The system will be installed in a clean-room facility of class iso 5, forming part of a larger lithography research line. The system must meet high performance specifications for resolution. The system is intended for exposure of photoresists where suitable exposure wavelength is 375 nm. The majority of processing will occur on chips sized from 5 mm by 5 mm up to standard 4 inch diameter wafers, however we require that up to 5 x 5 inch substrates can fit into the system. The LBL system should have good support for mix-and-match lithography, i.e. well documented procedures for sharing CAD pattern libraries for straightforward implementation in mix-and-match exposures with the EBL system in lot 1. The system needs to be installed by the supplier. Prior references of supplying comparable systems are required.
Doc Title: LBL system
Contract Type: supplies - Documents:
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CLICK HERE TO LOGINLbl System - Finland Tender
The UNIVERSITY OF JYVÄSKYLÄ, a Government sector organization in Finland, has announced a new tender for Lbl System. This tender is published on FinlandTenders under FIT Ref No: 117436139 and is categorized as a Tender. Interested and eligible suppliers are invited to participate by reviewing the tender documents and submitting their bids before the deadline on 2025-05-12.
The estimated tender value is Refer Document, and full details, including technical specifications and submission requirements, are provided in the official tender documents. Ensure all submissions meet the criteria outlined to be considered for evaluation.
