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Tender Details
- Country: Finland
- Summary: Lbl System
- FIT Ref No: 117436139
- Deadline: 12 May 2025
- Competition: ICB
- Financier: Self Financed
- Purchaser Ownership: Public
- Tender Value: Refer Document
- Notice Type: Tender
- Document Ref. No.: 230844-2025
- Purchaser's Detail :
- Description :
- A laser beam lithography system (LBL) for advanced microfabrication of semiconductor and biomedical devices. The system will be installed in a clean-room facility of class iso 5, forming part of a larger lithography research line. The system must meet high performance specifications for resolution. The system is intended for exposure of photoresists where suitable exposure wavelength is 375 nm. The majority of processing will occur on chips sized from 5 mm by 5 mm up to standard 4 inch diameter wafers, however we require that up to 5 x 5 inch substrates can fit into the system. The LBL system should have good support for mix-and-match lithography, i.e. well documented procedures for sharing CAD pattern libraries for straightforward implementation in mix-and-match exposures with the EBL system in lot 1. The system needs to be installed by the supplier. Prior references of supplying comparable systems are required.
Doc Title: LBL system
Contract Type: supplies - Documents :
Purchaser : UNIVERSITY OF JYVÄSKYLÄ
Address: Seminaarinkatu 15
Town: Jyväskylän yliopisto
NUTS-Code: FI193
Postal Code: 40014
Attn: Hankintapalvelut
Phone: +358 01426...
Email :hankinnat@jyu.fi
URL :http://www.jyu.fi
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