Metal Cmp and Brush Cleaner Tender
Notice for Metal Cmp and Brush Cleaner in Finland. The reference ID of the tender is 141968969 and it is closing on 25 May 2026.
Tender Details
- Country: Finland
- Summary: Metal Cmp and Brush Cleaner
- FIT Ref No: 141968969
- Deadline: 25 May 2026
- Financier: Self Financed
- Purchaser Ownership: Government
- Tender Value: Refer Document
- Notice Type: Tender
- Document Ref. No.: 596385
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- Description:
- THE OBJECT OF THE PROCUREMENTThe procurement concerns the delivery of an automatic metal Chemical Mechanical Polishing (CMP) system with an integrated wafer cleaner for processing and planarization of 200 mm semiconductor wafers. The scope includes the fully configured CMP tool, integrated cleaning unit, required accessories, and delivery, installation, and commissioning.Tool is acquired for processing of following applications: 1. Copper and barrier polishing steps for a. Integrated passive componentsb. CMOS wafers Back-End-of-the-Line (BEOL) and Mid-End-of-the-Line (MEOL)c. Hybrid bondingd. Above structures may include also low K materials which need special cleaning methods2. Through-silicon via (TSV) a. overburden metallization removal b. Silicon, silicon dioxide and silicon nitride polishing during the TSV back side processing3. Quantum computing related materials polishing Tool to be acquired needs to be able to deliver industrial level quality & repeatability while allowing flexibility in research and technology organisation environment: polishing is done on both wafers that meet SEMI standards and wafers and wafer stacks with non-standard thicknesses, non-beveled edges with large edge exclusions & fragile edges. Single tool is acquired to serve several polishing processes that include copper, insulators and quantum related materials; several polishing platens for several consumable sets are needed. The polishing tool configuration is based on the above constraints. ...
- Documents:
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CLICK HERE TO LOGINMetal Cmp and Brush Cleaner - Finland Tender
The TECHNOLOGY RESEARCH CENTER VTT OY, a Government sector organization in Finland, has announced a new tender for Metal Cmp and Brush Cleaner. This tender is published on FinlandTenders under FIT Ref No: 141968969 and is categorized as a Tender. Interested and eligible suppliers are invited to participate by reviewing the tender documents and submitting their bids before the deadline on 2026-05-25.
The estimated tender value is Refer Document, and full details, including technical specifications and submission requirements, are provided in the official tender documents. Ensure all submissions meet the criteria outlined to be considered for evaluation.
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