Tender Details

Country: Finland
Summary: Single Wafer Plasma Asher Tool
FIT Ref No: 113216266
Deadline: 23 Jan 2025
Financier: Self Financed
Purchaser Ownership: Government
Tender Value: Refer Document
Notice Type: Tender
Document Ref. No.: 32534-2025
Purchaser's Detail:
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Description:
The object of the tender process is Single wafer plasma asher tool (later also “Equipment”). The procurement object is a new 200 mm Single Wafer Plasma asher tool for the VTT Micronova cleanroom semiconductor front end. The procurement includes a process chamber for Polymer Removal and PR ash. The single-wafer plasma asher tool is for silicon semiconductor front-end, the tool must be compatible with industry-standard cleanroom requirements, including automated wafer handling, welded gas lines with VCR-gasket construction, particle filters, etc., and CE-compliant, with Emergency shutdown, capable processing of 200 mm including the following processes: Polymer removal PR ash (bulk strip, HDIS, Descums) The Single wafer asher tool will be used in silicon photonics devices, quantum devices, radiation detectors, and MEMS devices, which are the main product lines in the research fab. The object of the tender process is described in more detail in the invitation to tender documents.
Doc Title: Single wafer plasma asher tool
Contract Type: supplies
Documents:

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Single Wafer Plasma Asher Tool - Finland Tender

The VTT TECHNICAL RESEARCH CENTRE OF FINLAND LTD, a Government sector organization in Finland, has announced a new tender for Single Wafer Plasma Asher Tool. This tender is published on FinlandTenders under FIT Ref No: 113216266 and is categorized as a Tender. Interested and eligible suppliers are invited to participate by reviewing the tender documents and submitting their bids before the deadline on 2025-01-23.

The estimated tender value is Refer Document, and full details, including technical specifications and submission requirements, are provided in the official tender documents. Ensure all submissions meet the criteria outlined to be considered for evaluation.